Conax Technologies
https://www.conaxtechnologies.com/product/ion-implant-thermocouple-axcelis-implanter/
Export date: Fri Mar 29 15:06:28 2024 / +0000 GMT



Ion Implant Thermocouple for Axcelis Implanter

Product Categories: , ,

Product Page: https://www.conaxtechnologies.com/product/ion-implant-thermocouple-axcelis-implanter/

 

Product Description

Ion Implantation is a critical step in the manufacture of semiconductors. High energy implantation can heat the wafer and cause problems that lead to yield reduction. Monitoring the temperature of wafers during implantation is required to determine the amount of wafer cooling that is required.

Small-diameter, fast-response, spring-loaded thermocouples such as those shown above are an economical and reliable way to monitor ion implantation tool temperature.

 

Product added date: 2016-06-24 17:06:40
Product modified date: 2020-06-04 13:31:03

Export date: Fri Mar 29 15:06:28 2024 / +0000 GMT
Product data have been exported from Conax Technologies [ https://www.conaxtechnologies.com ]
Product Print by WooCommerce PDF & Print plugin.