Coated TCs can lower the cost of ASM^® EPSILON^® reactor ownership

Recently, we announced the launch of our new EtchDefender™ coating, which is now available on all Conax quartz thermocouple sheaths for ASM^® EPSILON^®
reactors. Exclusively from Conax, this patent-pending technology extends the life of quartz thermocouple sheaths in ASM^® EPSILON^®
reactors up to 3X longer.

What does that mean for ASM^® EPSILON^®
reactor owners in terms of dollars and
cents?

Even though TCs coated with EtchDefender™ cost more per thermocouple, ASM^® EPSILON^®
reactor owners can reduce their overall spend with:

• Lower cost of TCs—Using fewer thermocouples at a higher price point, you could lower your annual TC spend by as much as 30%.
• Less reactor downtime—By eliminating 1 to 2 maintenance cycles, you could save $500 to $10,000 per cycle.
• Higher wafer productivity—Wafer throughput increases by 2% to 5% for a total of $25,000+ per reactor, per year.
• Higher wafer quality—Reduced likelihood of wafer contamination due to opening chamber for thermocouple changes is invaluable! Plus, there’s no change to the susceptor ring or recipe.

View our EtchDefender™ video below or click here to download a white paper. If you have questions, email Mike Ferraro.

ASM^® and EPSILON^® are registered trademarks of ASM^® International. Neither Conax Technologies nor its products are affiliated with, approved by or sponsored by ASM^® International.