Real-time gas monitoring to minimize wafer loss and extend thermocouple life
Conax Technologies has developed an innovative solution to a common problem in epitaxial processing: premature failure of quartz thermocouple sheaths due to undetected hydrogen gas leaks.
Our exclusive LeakDefender™ Brand Thermocouples are designed specifically for use in certain epitaxial reactors working in tandem with the TC Sentry System™ to provide real-time monitoring that helps minimize wafer loss, improve yield, and extend tool uptime.
The challenge: Undetected leaks in a harsh environment
Inside an epitaxial reactor, quartz sheaths surrounding standard thermocouples are prone to attack and premature failure. These failures often go undetected until contamination has already occurred, resulting in:
- Wafer yield loss
- Costly tool downtime
- Damage to the tool
- Potential safety concerns
- Reduced thermocouple lifespan
The Conax solution: LeakDefender™ thermocouples and the TC Sentry System™
Working with the TC Sentry System™—manufactured by Helios Technical Services—our LeakDefender™ thermocouples offer a proactive way to detect leaks before they become costly. This system can instantly identify hydrogen leaks and trigger an immediate reactor shutdown, preventing contamination and minimizing wafer loss.
View our video for a demonstration to see how the system works in real time.
Why it matters
- Faster leak detection = reduced risk of contamination and wafer loss
- Improved uptime = fewer unplanned outages
- Longer thermocouple life = better ROI on components
- Increased operator safety = peace of mind
By detecting even a single quartz sheath failure early, manufacturers can save significant time, money, and product.
Learn more
Visit our LeakDefender™ product page or download the brochure to see how this powerful monitoring solution can help you minimize costly product loss and increase thermocouple life.