Conax Thermocouples for Epitaxial Reactors
Description
Conax Thermocouples for ASM®‡ EPSILON®‡ Reactors
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
Up to 3X longer life and savings of 35%-45%
Conax introduces EtchDefender™—the patented solution for extending the life of quartz thermocouple sheaths. EtchDefender™ is a quartz coating technology that can triple the life of the quartz sheath and provide savings of 35% to 45%. Conax’s cutting-edge technology has been tested both in the laboratory and in a production environment at a major wafer manufacturing facility.

EtchDefender™ advantages
Laboratory and production testing have shown:
- No particulation
- Increased Durability
- Slower quartz devitrification
- Slower quartz erosion
- Longer life
Highest Quality
Best Available Materials
- Pt and Pt/Rh wires are manufactured from mined ores – never manufactured from recycled materials
- Quartzware is exclusively semiconductor grade with 3 available levels of quality
- Insulators are of 99.5% purity or better, and are fired to remove organic impurities
- Connectors are laser engraved with serial numbers
Finest Workmanship
- Experienced and certified assemblers are used for every operation
- Electronic process flow, work instructions and revision control ensure manufacturing integrity
- Rigorous testing is performed at all assembly steps
- Precision laser welding is used to microscopically weld and immediately inspect the quality of every junction. The process minimizes HAZ (Heat Affected Zone) damage to the very small diameter wires and junctions used within the product line
- AS9100C, ISO 9001:2008 Certified
Cleanest Assembly Cell
- State-of-the-art assembly cell incorporates key clean room standards that minimize airborne particles
- Laminar flow tables are used for assembly operations
- Assemblers are outfitted in clean room apparel, gloves and magnifying goggles
Customized Designs
Quartz Sheath Thicknesses | Wire Diameters | |
Series 59: 0.059” (1.500mm) | Variation 05: 0.005” (.127mm) | |
Series 49: 0.049” (1.250mm) | Variation 08: 0.008” (.203mm) | |
Series 39: 0.039” (1.000mm) | Variation 10: 0.010” (.254mm) | |
Series 31: 0.031” (0.800mm) | Variation 12: 0.012” (.305mm) | |
Series 29: 0.029” (0.725mm) | ||
Series 23: 0.023” (0.575mm) | ||
Series 20: 0.020” (0.500mm) |
Other customized features include specifying:
- NEW—EtchDefender™ quartz sheath coating—up to 3X longer life
- 3 quality grades of quartz sheaths
Quartz Quality Index: |
Series Number XXXXP = Premium Quality Quartz |
Series Number XXXXE = Enhanced Quality Quartz |
Series Number XXXXS = Standard OEM Quality Quartz (Semiconductor Grade) |
- Center TC tip options – grounded or non-grounded
- Diffusion options – non-diffused or diffused
- Thermocouple wires – special long-life thermocouple wire options are available
- Packing – standard or special
Cross Reference Chart
Conax currently produces over 450 part numbers for the various designs we have developed for our customers. The following chart shows the 34 OEM part numbers cross-referenced to the Conax base configuration descriptions, other standard offerings that Conax routinely manufactures and other options that we could easily add for your unique need...
Chart Notes:
- Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
- Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart.
‡ OEM and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Blue shaded boxes denote OE thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart. NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator. All Conax designs have wires completely contained within insulators which reduces calibration drift
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
- Boxes with ① denote design not recommended by Conax
- Empty boxes denote possible Conax design available
- Normally, a complete set of thermocouples include either a Bijunction or Front thermocouple, but not both
- To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-150/200CR prefix added to 2310S-G1D1 suffix equals Conax description AE-150/200CR-2310S-G1D1
- Consult Conax for other options not discussed on the website
150mm Center AE-150/200CR- or AE-150/200CA- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P-G0D0 | 4910P-G0D0 | 4912P-G0D0 | |
Series 39 | 3905P-G0D0 | ① | ① | ① |
Series 31 | 3108P-G0D0 | 3110P-G0D0 02-352105D01 02-352105D02 |
① | |
Series 23 | 2308E-G1D1 2308S-G1D1 |
2310E-G1D1 2310S-G1D1 02-321895D01 02-323584D01 |
2312E-G1D1 |
|
Series 20 | 2308E-G0D1 2308S-G0D1 |
2310P-G0D1 2310E-G0D1 02-330816D01 02-330816D02 |
150mm Bijunction AE-150B- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 59 | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352074D01 |
① |
Series 39 | 3908P 3908E |
3910P 3910E |
|
Series 29 | 2908S | 2910S 02-327874D01 |
150mm Front AE-150F- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 59 | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352119D01 |
① |
Series 39 | 3908P 3908E |
3910P 3910E |
|
Series 29 | 2908S | 2910S 02-323647D01 |
150mm Side AE-150S- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 59 | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352078D01 |
① |
Series 39 | 3908P 3908E |
3910P 3910E |
|
Series 29 | 2908S | 2910S 02-323649D01 |
150mm Rear AE-150R- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 59 | 5905P | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352076D01 |
① | |
Series 39 | 3908P 3908E |
3910P 3910E |
3912E | |
Series 29 | 2908S | 2910S 02-323648D01 |
Chart Notes:
- Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
- Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart.
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart. NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator. All Conax designs have wires completely contained within insulators which reduces calibration drift
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
- Boxes with ① denote design not recommended by Conax
- Empty boxes denote possible Conax design available
- Normally, a complete set of thermocouples include either a Bijunction or Front thermocouple, but not both
- To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-150/200CR prefix added to 2310S-G1D1 suffix equals Conax description AE-150/200CR-2310S-G1D1
- Consult Conax for other options not discussed on the website
200mm Center AE-150/200CR- or AE-150/200CA- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P-G0D0 | 4910P-G0D0 | 4912P-G0D0 | |
Series 39 | 3905P-G0D0 | ① | ① | ① |
Series 31 | 3108P-G0D0 | 3110P-G0D0 02-352105D01 02-352105D02 |
① | |
Series 23 | 2308E-G1D1 2308S-G1D1 |
2310E-G1D1 2310S-G1D1 02-321895D01 02-323584D01 |
2312E-G1D1 |
|
Series 20 | 2308E-G0D1 2308S-G0D1 |
2310P-G0D1 2310E-G0D1 02-330816D01 02-330816D02 |
200mm Bijunction AE-200B- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 59 | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352066D01 |
① |
Series 39 | 3908P 3908E |
3910P 3910E |
|
Series 29 | 2908S | 2910S 02-327875D01 |
200mm Front AE-200F- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 59 | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352118D01 |
① |
Series 39 | 3908P 3908E |
3910P 3910E |
|
Series 29 | 2908S | 2910S 02-323652D01 |
200mm Side AE-200S- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 59 | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352072D01 |
① |
Series 39 | 3908P 3908E |
3910P 3910E |
|
Series 29 | 2908S | 2910S 02-323654D01 |
200mm Rear AE-200R- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 59 | 5905P | 5908P | 5910P | 5912P |
Series 49 | 4908P | 4910P 02-352070D01 |
① | |
Series 39 | 3908P 3908E |
3910P 3910E |
3912E | |
Series 29 | 2908S | 2910S 02-323653D01 |
Chart Notes:
- Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
- Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart.
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Boxes with ① denote design not recommended by Conax
- Empty boxes denote possible Conax design available
- Normally, a complete set of thermocouples include either a Bijunction or Front thermocouple, but not both
- To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-300CR prefix added to 3910S-G0D0 suffix equals Conax description AE-300CR-3910S-G0D0
- Consult Conax for other options not discussed on the website
300mm Center AE-300CR- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P-D0G0 | 4910P-D0G0 | ① | |
Series 39 | 3908S-D0G0 | 3910S-D0G0 02-178674D01 02-144677-01 |
3912E-D0G0 |
300mm Bijunction AE-300B- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P | 4910P | ① | |
Series 39 | 3908S | 3910S 02-178704D01 |
3912E |
300mm Front AE-300F- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P | 4910P | ① | |
Series 39 | 39085 | 3910S | 3912E |
300mm Side AE-300S- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P | 4910P | ① | |
Series 39 | 3908S | 3910S 02-178706D01 |
3912E |
300mm Rear AE-300R- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P | 4910P | ① | |
Series 39 | 3908S | 3910S 02-178705D01 |
3912E |
Chart Notes:
- Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
- Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart.
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart. NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator. All Conax designs have wires completely contained within insulators which reduces calibration drift
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
- Boxes with ① denote design not recommended by Conax
- Empty boxes denote possible Conax design available
- Normally, a complete set of thermocouples include 2 of the 3 following sensors: Front-Side, Front-Rear, Side-Rear
- To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-150/200CR prefix added to 2310S-G1D1 suffix equals Conax description AE-150/200CR-2310S-G1D1
- Consult Conax for other options not discussed on the website
200mm OPR Center AE-150/200CR- or AE-150/200CA- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 49 | 4908P-G0D0 | 4910P-G0D0 | 4912P-G0D0 | |
Series 39 | 3905P-G0D0 | ① | ① | ① |
Series 31 | 3108P-G0D0 | 3110P-G0D0 02-352105D01 02-352105D02 |
① | |
Series 23 | 2308E-G1D1 2308S-G1D1 |
2310E-G1D1 2310S-G1D1 02-321895D01 02-323584D01 |
2312E-G1D1 |
|
Series 20 | 2308E-G0D1 2308S-G0D1 |
2310P-G0D1 2310E-G0D1 02-330816D01 02-330816D02 |
200mm OPR Front-Side AE-200OPR-FS- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 79 | 7910E 02-338332-01 |
7912E |
200mm OPR Front-Rear AE-200OPR-FR- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 79 | 7910E 02-338455-01 |
7912E |
200mm OPR Side-Rear AE-200OPR-SR- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 79 | 7910E 1061-542-01 |
7912E |
Chart Notes:
- Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
- Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart.
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM®‡ but makes similar units as described by the Conax Series numbers shown in the chart. NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator. All Conax designs have wires completely contained within insulators which reduces calibration drift
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
- Boxes with ① denote design not recommended by Conax
- Empty boxes denote possible Conax design available
- Normally, a complete set of thermocouples include 2 of the 3 following sensors: Front-Side, Front-Rear, Side-Rear
- To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-300CR prefix added to 2310S-G1D1 suffix equals Conax description AE-300CR-2310S-G1D1
- Consult Conax for other options not discussed on the website
300mm OPR Center AE-300CR- or AE-300CA- |
||||
Wire Diameter | 0.005" | 0.008" | 0.010" | 0.012" |
Quartz Thickness | ||||
Series 59 | 5908P-G0D0 | 5910P-G0D0 | 5912P-G0D0 | |
Series 49 | 4908P-G0D0 | 4910P-G0D0 | ① | |
Series 39 | 3908S-G0D0 | 3910S-G0D0 02-178674D01 02-144677-01 |
3912S-G0D0 |
300mm OPR Front-Side AE-300OPR-FS- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 79 | 7910S 1070-292-01 |
7912S |
300mm OPR Front-Rear AE-300OPR-FR- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 79 | 7910S |
7912S |
300mm OPR Side-Rear AE-300OPR-SR- |
|||
Wire Diameter | 0.008" | 0.010" | 0.012" |
Quartz Thickness | |||
Series 79 | 7910S 1070-291-01 |
7912S |