ASM®

ASM®

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Description

Thermocouples for ASM® EPSILON® Reactors

Up to 3X longer life and savings of 35%-45%

Conax introduces EtchDefender™—the patent-pending solution for extending the life of quartz thermocouple sheaths. EtchDefender™ is a quartz coating technology that can triple the life of the quartz sheath and provide savings of 35% to 45%. Conax’s cutting-edge technology has been tested both in the laboratory and in a production environment at a major wafer manufacturing facility.

EtchDefender™ advantages

Laboratory and production testing have shown:

  • No particulation
  • Increased Durability
  • Slower quartz devitrification
  • Slower quartz erosion
  • Longer life

Highest Quality

We manufacture our sensors using the best available materials, cleanest assembly cell and the finest workmanship in the industry.

Best Available Materials

  • Pt and Pt/Rh wires are manufactured from mined ores – never manufactured from recycled materials
  • Quartzware is exclusively semiconductor grade with 3 available levels of quality
  • Insulators are of 99.5% purity or better, and are fired to remove organic impurities
  • Connectors are laser engraved with serial numbers

Finest Workmanship

  • Experienced and certified assemblers are used for every operation
  • Electronic process flow, work instructions and revision control ensure manufacturing integrity
  • Rigorous testing is performed at all assembly steps
  • Precision laser welding is used to microscopically weld and immediately inspect the quality of every junction.  The process minimizes HAZ (Heat Affected Zone) damage to the very small diameter wires and junctions used within the product line
  • AS9100C, ISO 9001:2008 Certified

Cleanest Assembly Cell

  • State-of-the-art assembly cell incorporates key clean room standards that minimize airborne particles
  • Laminar flow tables are used for assembly operations
  • Assemblers are outfitted in clean room apparel, gloves and magnifying goggles

 

Customized Designs

We are the only manufacturer who can customize designs and configure sensor sets that optimize our customers’ performance objectives.  We start specifying our sensors using a base configuration model comprised of selecting one of 7 quartz sheath thickness options and one of 4 wire diameter options, creating the possibility of 28 base configuration models.
Quartz Sheath Thicknesses Wire Diameters
Series 59: 0.059” (1.500mm) Variation 05: 0.005” (.127mm)
Series 49: 0.049” (1.250mm) Variation 08: 0.008” (.203mm)
Series 39: 0.039” (1.000mm) Variation 10: 0.010” (.254mm)
Series 31: 0.031” (0.800mm) Variation 12: 0.012” (.305mm)
Series 29: 0.029” (0.725mm)
Series 23: 0.023” (0.575mm)
Series 20: 0.020” (0.500mm)

Other customized features include specifying:

  • NEW—EtchDefender™ quartz sheath coating—up to 3X longer life
  •  3 quality grades of quartz sheaths
Quartz Quality Index:
Series Number XXXXP = Premium Quality Quartz
Series Number XXXXE = Enhanced Quality Quartz
Series Number XXXXS = Standard OEM Quality Quartz (Semiconductor Grade)
  • Center TC tip options – grounded or non-grounded
  • Diffusion options – non-diffused or diffused
  • Thermocouple wires – special long-life thermocouple wire options are available
  • Packing – standard or special

Cross Reference Chart

Conax currently produces over 450 part numbers for the various designs we have developed for our customers. The following chart shows the 34 OEM part numbers cross-referenced to the Conax base configuration descriptions, other standard offerings that Conax routinely manufactures and other options that we could easily add for your unique need...

150mm Thermocouple Product Line
Chart Notes:
  • Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
  • Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.
  • Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.  NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator.  All Conax designs have wires completely contained within insulators which reduces calibration drift
  • Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
  • Boxes with ① denote design not recommended by Conax
  • Empty boxes denote possible Conax design available
  • Normally, a complete set of thermocouples include either a Bijunction or Front thermocouple, but not both
  • To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-150/200CR prefix added to 2310S-G1D1 suffix equals Conax description AE-150/200CR-2310S-G1D1
  • Consult Conax for other options not discussed on the website
150mm Center AE-150/200CR- or AE-150/200CA-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49 4908P-G0D0 4910P-G0D0 4912P-G0D0
 Series 39  3905P-G0D0
 Series 31  3108P-G0D0 3110P-G0D0 02-352105D01 02-352105D02
 Series 23 2308E-G1D1 2308S-G1D1 2310E-G1D1 2310S-G1D1 02-321895D01 02-323584D01

2312E-G1D1

 Series 20 2308E-G0D1 2308S-G0D1  2310P-G0D1 2310E-G0D1 02-330816D01 02-330816D02
150mm Bijunction AE-150B-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5908P 5910P 5912P
 Series 49 4908P 4910P 02-352074D01  ①
 Series 39 3908P 3908E 3910P 3910E
 Series 29 2908S 2910S 02-327874D01
150mm Front AE-150F-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5908P 5910P 5912P
 Series 49 4908P 4910P 02-352119D01  ①
 Series 39 3908P 3908E 3910P 3910E
 Series 29 2908S  2910S 02-323647D01
150mm Side AE-150S-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59   5908P 5910P 5912P
 Series 49 4908P 4910P 02-352078D01  ①
 Series 39 3908P 3908E 3910P 3910E
 Series 29 2908S 2910S 02-323649D01
150mm Rear AE-150R-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5905P 5908P 5910P 5912P
 Series 49 4908P 4910P 02-352076D01  ①
 Series 39  3908P 3908E 3910P 3910E  3912E
 Series 29 2908S 2910S 02-323648D01
 
200mm Thermocouple Product Line
Chart Notes:
  • Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
  • Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.
  • Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.  NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator.  All Conax designs have wires completely contained within insulators which reduces calibration drift
  • Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
  • Boxes with ① denote design not recommended by Conax
  • Empty boxes denote possible Conax design available
  • Normally, a complete set of thermocouples include either a Bijunction or Front thermocouple, but not both
  • To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-150/200CR prefix added to 2310S-G1D1 suffix equals Conax description AE-150/200CR-2310S-G1D1
  • Consult Conax for other options not discussed on the website
200mm Center AE-150/200CR- or AE-150/200CA-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49 4908P-G0D0 4910P-G0D0 4912P-G0D0
 Series 39  3905P-G0D0  ①
 Series 31  3108P-G0D0 3110P-G0D0 02-352105D01 02-352105D02
 Series 23 2308E-G1D1 2308S-G1D1 2310E-G1D1 2310S-G1D1 02-321895D01 02-323584D01

2312E-G1D1

 Series 20 2308E-G0D1 2308S-G0D1  2310P-G0D1 2310E-G0D1 02-330816D01 02-330816D02
200mm Bijunction AE-200B-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5908P 5910P 5912P
 Series 49 4908P 4910P 02-352066D01  ①
 Series 39 3908P 3908E 3910P 3910E
 Series 29 2908S 2910S 02-327875D01
200mm Front AE-200F-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5908P 5910P 5912P
 Series 49 4908P 4910P 02-352118D01  ①
 Series 39 3908P 3908E 3910P 3910E
 Series 29 2908S  2910S 02-323652D01
200mm Side AE-200S-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59   5908P 5910P 5912P
 Series 49 4908P 4910P 02-352072D01  ①
 Series 39 3908P 3908E 3910P 3910E
 Series 29 2908S 2910S 02-323654D01
200mm Rear AE-200R-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5905P 5908P 5910P 5912P
 Series 49 4908P 4910P 02-352070D01  ①
 Series 39  3908P 3908E 3910P 3910E  3912E
 Series 29 2908S 2910S 02-323653D01
 
300mm Thermocouple Product Line

Chart Notes:

  • Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
  • Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.
  • Boxes with ① denote design not recommended by Conax
  • Empty boxes denote possible Conax design available
  • Normally, a complete set of thermocouples include either a Bijunction or Front thermocouple, but not both
  • To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-300CR prefix added to 3910S-G0D0 suffix equals Conax description AE-300CR-3910S-G0D0
  • Consult Conax for other options not discussed on the website
300mm Center
AE-300CR-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49   4908P-D0G0 4910P-D0G0
  Series 39  3908S-D0G0  3910S-D0G0
02-178674D01
02-144677-01
  3912E-D0G0
300mm Bijunction
AE-300B-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49 4908P 4910P  ①
 Series 39  3908S 3910S
02-178704D01
 3912E
300mm Front
AE-300F-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49   4908P 4910P
  Series 39  39085  3910S  3912E
300mm Side
AE-300S-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49 4908P 4910P  ①
 Series 39  3908S 3910S
02-178706D01
 3912E
300mm Rear
AE-300R-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49 4908P 4910P  ①
 Series 39  3908S 3910S
02-178705D01
 3912E

 

200mm OPR Thermocouple Product Line
Chart Notes:
  • Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
  • Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.
  • Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.  NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator.  All Conax designs have wires completely contained within insulators which reduces calibration drift
  • Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
  • Boxes with ① denote design not recommended by Conax
  • Empty boxes denote possible Conax design available
  • Normally, a complete set of thermocouples include 2 of the 3 following sensors:  Front-Side, Front-Rear, Side-Rear
  • To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-150/200CR prefix added to 2310S-G1D1 suffix equals Conax description AE-150/200CR-2310S-G1D1
  • Consult Conax for other options not discussed on the website
 
200mm OPR Center AE-150/200CR- or AE-150/200CA-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 49 4908P-G0D0 4910P-G0D0 4912P-G0D0
 Series 39  3905P-G0D0
 Series 31  3108P-G0D0 3110P-G0D0 02-352105D01 02-352105D02
 Series 23 2308E-G1D1 2308S-G1D1 2310E-G1D1 2310S-G1D1 02-321895D01 02-323584D01

2312E-G1D1

 Series 20 2308E-G0D1 2308S-G0D1  2310P-G0D1 2310E-G0D1 02-330816D01 02-330816D02
200mm OPR Front-Side AE-200OPR-FS-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 79 7910E 02-338332-01 7912E
200mm OPR Front-Rear AE-200OPR-FR-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 79 7910E 02-338455-01 7912E
200mm OPR Side-Rear AE-200OPR-SR-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 79 7910E 1061-542-01 7912E
300mm OPR Thermocouple Product Line
Chart Notes:
  • Any Conax thermocouple may have EtchDefender™ coating included by adding “-E3” to the end of the thermocouple description
  • Yellow shaded boxes denote OEM standard quartz and wire sizes; OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.
  • Blue shaded boxes denote OEM thick quartz design, OEM part numbers are show in italics, Conax does not make these parts for ASM® but makes similar units as described by the Conax Series numbers shown in the chart.  NOTE that the OEM design has 1 wire in the hot zone exposed directly to the quartz sheath, unprotected by an isolation insulator.  All Conax designs have wires completely contained within insulators which reduces calibration drift
  • Orange shaded boxes denote extra thick quartz sheaths with larger-than-standard OD, special susceptor and susceptor ring required
  • Boxes with ① denote design not recommended by Conax
  • Empty boxes denote possible Conax design available
  • Normally, a complete set of thermocouples include 2 of the 3 following sensors:  Front-Side, Front-Rear, Side-Rear
  • To construct a complete Conax description, add the prefix in the chart title block to the suffix in the chart body; for example: AE-300CR prefix added to 2310S-G1D1 suffix equals Conax description AE-300CR-2310S-G1D1
  • Consult Conax for other options not discussed on the website
 
300mm OPR Center AE-300CR- or AE-300CA-
 Wire Diameter 0.005"  0.008"  0.010"  0.012"
 Quartz Thickness
 Series 59 5908P-G0D0 5910P-G0D0 5912P-G0D0
 Series 49   4908P-G0D0 4910P-G0D0
 Series 39 3908S-G0D0 3910S-G0D0 02-178674D01 02-144677-01 3912S-G0D0
300mm OPR Front-Side AE-300OPR-FS-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 79 7910S 1070-292-01 7912S
300mm OPR Front-Rear AE-300OPR-FR-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 79 7910S 1070-291-01 7912S
300mm OPR Side-Rear AE-300OPR-SR-
 Wire Diameter 0.008"  0.010"  0.012"
 Quartz Thickness
 Series 79 7910S 7912S

ASM® and EPSILON® are registered trademarks of ASM® International. Neither Conax Technologies nor its products are affiliated with, approved by or sponsored by ASM® International.

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