Longer TC life. Lower spend.
Visit us at SEMICON West Booth #5722 to learn about our patent-pending EtchDefender™ Technology. This exclusive coating extends the life of quartz thermocouple sheaths in ASM® EPSILON® epitaxial reactors up to 3 times longer to reduce your annual TC spend. Click here to preview our video and find out more.
Profile and Spike Thermocouples
We also offer standard or custom designed Profile and Spike Thermocouples for vertical and horizontal furnaces. Our thermocouples are high-precision temperature sensors, engineered to address the critical process temperature measurement and control required for the semiconductor, photovoltaic and LED industries. Talk to us about the wide range of thermocouple designs we manufacture for use on all the leading furnaces.
We are a leading source of pressure/vacuum feedthroughs. We offer various standard products and have the capability to custom design a solution for any application or equipment. We also specialize in HAST feedthroughs for reliability testing.