Customer Requirement: This design was created for an end user of an ASM®‡ EPSILON®‡ E2000 epitaxial reactor. In this case, we were asked to provide a comparable design at a lower price than the OEM supplier. Metal sheaths cannot be used without contaminating the process, which incorporates temperatures up to 1200º C.
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
Solution: Four Type R thermocouples are used to monitor the process in the center and at three places around a graphite susceptor used to process a 200mm wafer. The assemblies use quartz sheaths. Typical life for these sensors is one month per set.
Impact: The high replacement cost was what led the customer to seek a lower cost solution, which Conax was able to provide.