Single-Point Calibration TC for the Barrel Reactor
Conax offers a Single-Point calibration thermocouple designed for use on Applied Materials/Moore Technologies 76XX, 77XX and 78XX Series Epitaxial Barrel Reactors.
The Single-Point sensor allows for the calibration of the 3 infrared (IR) sensors used to monitor susceptor temperature during wafer processing. The Single-Point needs to be repositioned in the susceptor to check the calibration of each or the 3 IR sensors. The Single-Point sensors use K-Type thermocouple wire and a Haynes 214 sheath.