Conax offers a full range of solutions for the semiconductor industry. Find out more.
Profile and Spike Thermocouples for Vertical and Horizontal Furnaces
Conax profile thermocouples are high-precision temperature sensors, standard or custom designed for the semiconductor, solar and LED industries. These thermocouples are engineered to address the critical process temperature measurement and control required for those industries. We manufacture a wide range of thermocouple designs used on virtually all the leading diffusion furnaces:
- ATV Technologies
Choose from one of our standard designs for either vertical or horizontal type furnaces, or let us work with you to develop a customized design. Both profile and spike thermocouples are available in the following Pt–Rh noble metal calibrations: Type B, Type R and Type S – along with base metal calibrations Type K and Type N
Here are examples of standard profile thermocouples we offer...
Profile Thermocouples for ASM® A4XX Family of Vertical Furnaces
Conax offers Profile thermocouples for the A4XX furnace. Shown is a standard 5-zone configuration. Product design options include extra thick or removable sheaths, vacuum feedthroughs for the lead wires and abilities to customize other product features.
Profile Thermocouples for Kokusai Family of Vertical Furnaces
Conax offers Profile thermocouples for Kokusai furnaces such as the Vertron® series show – available with either quartz or SiC sheaths.
Profile Thermocouples for the TEL Family of Vertical Furnaces
Conax offers Profile thermocouples for TEL furnaces such as the Alpha® series shown.
Profile Thermocouples for Horizontal Furnaces
Conax offers many versions for horizontal profile thermocouples, typically 3-zone units, that have sheaths with or without quartz socket mounts and various connector configurations.
The internal thermocouples are typically supplied in a 3-zone or 5-zone configuration. The thermocouple wire can populate either a single 6-hole or 10-hole insulator. Alternatively, the wires can populate three or five 2-hole insulators.
Connectorization is accommodated by standard or miniature 2-pin connectors. Multi-pin screw or bayonet-style connectors are also offered. The lead wire between the probe and the connectors run continuously using the same noble metal thermocouple wire that is installed in the quartz sheath. As a cost savings option, Conax may transition to extension grade wire for the lead wires.
We offer different tip configurations for both single and dual spike thermocouples as illustrated below...
ASM® and EPSILON® are registered trademarks of ASM® International. Neither Conax Technologies nor its products are affiliated with, approved by or sponsored by ASM® International.