Our patented solution protects quartz sheaths during the etch process
Engineered specifically for use during the harsh etch process in epitaxial reactors, EtchDefender™ coating protects quartz thermocouple sheaths from corrosive gases, extending the life of quartz thermocouple sheaths up to three times longer than uncoated sheaths. The result: less reactor downtime, higher productivity and lower cost of ownership.
Watch our 90-second video for a demo.
How it works
Our proven solution provides the following unique advantages over uncoated quartz thermocouples:
- No particulation – EtchDefender™ coating is well adhered and will not flake from the quartz substrate, which can cause particle contamination to the wafer.
- Durability – The coating does not decompose, out-gas, or sublimate under vacuum at high temperature.
- Slower devitrification – The coating greatly slows the typical devitrification process by retarding the loss of oxygen from the SiO2 quartz sheath at temperatures more than 900 °C.
- Slower erosion – The coating greatly retards the erosion process caused by hot corrosive gases flowing at high concentrations and velocities. This is most relevant in extending the life of the Center Thermocouple.
- Significantly longer life – The coating will allow quartz sheaths to last up to three times longer.
Proven performance
Using TCs coated with EtchDefender™ allows a tool to run continuously and reduces maintenance cycles, resulting in:
- Increased process uptime
- Reduced process variation – more wafers can be produced per tool with higher consistency
- Reduced labor and increased safety
- Decreased risk of technicians igniting pyrophoric deposits, because of reduced maintenance requirements
- Decreased exposure of the chamber to oxygen, resulting in less time needed to purge the oxygen from all surfaces
Ideas. Solutions. Success.
At Conax Technologies, we know that even a small change can have a big impact on your yield – and your bottom line. That’s why we engineer solutions like EtchDefender™ to help you maximize performance, minimize costs, and maintain your competitive edge.
Download our EtchDefender™ white paper. And learn more about our many innovative solutions for the semiconductor industry, including Conax LeakDefender™ Brand Thermocouples.