Meeting the most demanding applications in wafer processing, including epitaxy, diffusion, and oxidation
Drawing on more than 75 years of engineering innovation, Conax Technologies designs and manufactures both standard and custom products that deliver proven reliability – even under the most challenging process conditions.
From wafer fabrication to final testing, semiconductor processing environments demand extreme precision, stability, and cleanliness. Conax meets these requirements with an extensive range of temperature sensors, vacuum/pressure feedthroughs, and cable assemblies specifically engineered for semiconductor applications.
Reliable performance in every process stage
Conax products are used across a wide range of semiconductor manufacturing applications, including wafer processing, LED/laser production, photovoltaic panel manufacturing, and package and test operations.
Our temperature sensors and compression seal fittings are designed to maintain exceptional accuracy and stability in high-temperature and high-vacuum environments – helping ensure process integrity and product quality.
Download our brochure to see our broad range of sensors and fittings for semi.
Custom thermocouples for epitaxial reactors
Conax manufactures complete sets of thermocouples for 150 mm, 200 mm, and 300 mm epitaxial reactors. Each sensor features semiconductor-grade quartz sheaths and laser-engraved serial numbers for full traceability. Options include unique product offerings such as EtchDefender™ and LeakDefender™ to reduce tool owner’s cost of ownership. Additional options include quartz re-sheathing, platinum reclamation and transmitters.
Profile and spike thermocouples for diffusion furnaces
Conax profile and spike thermocouples – available in type R, S and B calibrations – are designed for both vertical and horizontal furnaces. Configurations include 3-zone and 5-zone assemblies, with customizable sheath sizes, wire diameters, and connector options.
For applications requiring redundant measurement or drift tracking, dual spike thermocouples can be configured with different calibration wires, allowing users to make maintenance decisions based on real data (drift between the dual TCs) rather than fixed schedules.
Precision manufacturing and cleanroom assembly
Every Conax epitaxial and profile thermocouple is assembled in a controlled environment using Class 100 laminar flow tables, then heat-sealed in double bags suitable for cleanroom environments. Each instrument is tested and calibrated against standards traceable to NIST in an ISO 17025 accredited laboratory and built under an AS9100 with ISO 9001 quality program.
Our advanced data acquisition systems automate calibration and verification, ensuring consistency, accuracy, and complete documentation for every sensor produced.
Let’s talk about your semiconductor process challenges.
Whether you need improved temperature stability, extended thermocouple life, or specialized feedthrough configurations, our engineers are ready to collaborate on the right solution for your application. Email us at [email protected], submit a contact form, or call +1 800 223 2389 to speak with one of our application engineers. You can also download our brochure or visit our semiconductor page for additional product information.